research article
Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
2013
In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fabricating the stamp using stencil lithography, which has the potential for a cost reduction in some fabrication facilities. We show that the stamps reproduce the membrane aperture patterns within ±10 nm and we validate such stamps by using them to fabricate metallic nanowires down to 100 nm in size.
Type
research article
Web of Science ID
WOS:000329707400002
Author(s)
Martin-Olmos, Cristina
Date Issued
2013
Publisher
Published in
Volume
4
Start page
370
End page
377
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
Available on Infoscience
October 16, 2013
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