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  4. Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography
 
research article

Resistless Fabrication of Nanoimprint Lithography (NIL) Stamps Using Nano-Stencil Lithography

Villanueva, Luis Guillermo  
•
Vazquez-Mena, Oscar  
•
Martin-Olmos, Cristina
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2013
Micromachines

In order to keep up with the advances in nano-fabrication, alternative, cost-efficient lithography techniques need to be implemented. Two of the most promising are nanoimprint lithography (NIL) and stencil lithography. We explore here the possibility of fabricating the stamp using stencil lithography, which has the potential for a cost reduction in some fabrication facilities. We show that the stamps reproduce the membrane aperture patterns within ±10 nm and we validate such stamps by using them to fabricate metallic nanowires down to 100 nm in size.

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Type
research article
DOI
10.3390/mi4040370
Web of Science ID

WOS:000329707400002

Author(s)
Villanueva, Luis Guillermo  
Vazquez-Mena, Oscar  
Martin-Olmos, Cristina
Savu, Andreea Veronica  
Sidler, Katrin  
Brugger, Jürgen  
Date Issued

2013

Publisher

MDPI

Published in
Micromachines
Volume

4

Start page

370

End page

377

Subjects

nanostencil lithography

•

nanoimprint lithography

•

nanowires

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
LMIS1  
Available on Infoscience
October 16, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/96219
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