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  4. Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy
 
conference paper

Uniform Tilt-Angle Micromirror Array for Multi Object Spectroscopy

Waldis, S.
•
Clerc, P.-A.
•
Zamkostian, F.
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2007
MOEMS and Miniaturized Systems VI
MOEMS-MEMS 2007 Micro and Nanofabrication
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Type
conference paper
DOI
10.1117/12.702012
Author(s)
Waldis, S.
Clerc, P.-A.
Zamkostian, F.
Zickar, M.
Noell, W.  
de Rooij, N. F.  
Date Issued

2007

Published in
MOEMS and Miniaturized Systems VI
Series title/Series vol.

SPIE Proceedings; 6466

Start page

646603

Note

waldis_pw07_6466-2.pdf

Editorial or Peer reviewed

NON-REVIEWED

Written at

OTHER

EPFL units
SAMLAB  
Event nameEvent placeEvent date
MOEMS-MEMS 2007 Micro and Nanofabrication

San Jose, California, United States

20-25 January 2007

Available on Infoscience
May 12, 2009
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/40008
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