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  4. Strategy for the Control of a Dual-stage Nano-positioning System with a Single Metrology
 
conference paper

Strategy for the Control of a Dual-stage Nano-positioning System with a Single Metrology

Michellod, Y.
•
Mullhaupt, Ph.  
•
Gillet, D.  
2006
2006 IEEE Conference on Robotics, Automation and Mechatronics
2006 IEEE International Conference on Robotics, Automation & Mechatronics (RAM)

A double-stage feedback control structure for a double-stage mechanical system, with a single optical metrology is developed to reach the nanometer accuracy at high bandwidth over large displacements. A piezoelectric stack actuator is used for fine positioning, while a permanent magnet (PM) stepper motor handles the coarse positioning. Two different control approaches are compared to drive the PM stepper motor, while a classical PID controller is designed to drive the piezoelectric actuator. Since only a single measurement device is used, the references for both control loops (fine and coarse) must be suitably obtained. An adequate control structure including a partial observer is designed so as to take into account the influence of the fine actuator on the position estimation of the coarse actuator. The complete control mechanism and strategy ensure the tracking of the real reference with sufficient accuracy and bandwidth.

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Type
conference paper
DOI
10.1109/RAMECH.2006.252649
Web of Science ID

WOS:000244443800043

Author(s)
Michellod, Y.
Mullhaupt, Ph.  
Gillet, D.  
Date Issued

2006

Published in
2006 IEEE Conference on Robotics, Automation and Mechatronics
Subjects

Nanometer resolution

•

Large-displacement

•

Trajectory tracking

•

Observer

•

Overactuation

•

Interferometer sensor

•

Piezoelectric

•

PM stepper motor

•

Feedback

Note

Prj_DDL

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LA  
REACT  
Event nameEvent placeEvent date
2006 IEEE International Conference on Robotics, Automation & Mechatronics (RAM)

Bangkok, Thailand

June 7-9, 2006

Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/221769
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