Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution

Depeursinge, C. D.; Marian, A. M.; Montfort, F.; Colomb, T.; Charriere, F.; Kuhn, J.

doi:10.1007/3-540-29303-5_41

conference paper

Digital Holographic Microscopy (DHM) applied to optical metrology: A resolution enhanced imaging technology applied to inspection of microscopic devices with subwavelength resolution

Depeursinge, C. D.

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Marian, A. M.

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Montfort, F.

2006

Fringe 2005

The 5th International Workshop on Automatic Processing of Finge Patterns