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The Potential Dependence of Silicon Anisotropic Etching in KOH at 60ÝC
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research article
The Potential Dependence of Silicon Anisotropic Etching in KOH at 60ÝC
Smith, R.
•
Kloeck, B.
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de Rooij, N. F.
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1987
Electroanalytical Chemistry
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