conference paper
Advanced Sensor Systems by Low-Temperature Heterogeneous 3D Integration Processes
January 1, 2018
2018 Symposium On Design, Test, Integration & Packaging Of Mems And Moems (Dtip)
A few application demonstrators of heterogeneous 3D integrated systems including innovative nanosensors for gas detection and biofludic applications have been successfully implemented showing efficient low-temperature heterogeneous integration processes, miniaturization, low power consumption, extremely low detection limits (5 ppm) and novel functionalities very interesting for smart sensors in automotive and healthcare applications.