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  4. Towards Nanomechanics and Nanoelectronics on a Single Chip
 
doctoral thesis

Towards Nanomechanics and Nanoelectronics on a Single Chip

Bartsch, Sebastian Thimotee  
2013
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Type
doctoral thesis
DOI
10.5075/epfl-thesis-5888
Author(s)
Bartsch, Sebastian Thimotee  
Advisors
Ionescu, Mihai Adrian  
Jury

M. Gijs (président), M. Hegner, C. Hierold, M. Roukes

Date Issued

2013

Publisher

EPFL

Publisher place

Lausanne

Public defense year

2013-10-04

Thesis number

5888

Subjects

nanoelectromechanical systems

•

NEMS

•

micromechanical systems

•

MEMS

•

resonator

•

resonant-body transistor

•

FET

•

junctionless

•

mass sensor

•

gravimetric sensor

•

receiver

•

demodulation

•

mixing

•

frequency stability

•

silicon-on-insulator

•

SOI

•

monolithic

•

CMOS

EPFL units
NANOLAB  
Faculty
STI  
School
IEL  
Doctoral School
EDMI  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/96016
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