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research article

Nonlinearity in nanomechanical cantilevers

Villanueva, L. G.  
•
Karabalin, R. B.
•
Matheny, M. H.
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2013
Physical Review B

Euler-Bernoulli beam theory is widely used to successfully predict the linear dynamics of micro-and nanocantilever beams. However, its capacity to characterize the nonlinear dynamics of these devices has not yet been rigorously assessed, despite its use in nanoelectromechanical systems development. In this article, we report the first highly controlled measurements of the nonlinear response of nanomechanical cantilevers using an ultralinear detection system. This is performed for an extensive range of devices to probe the validity of Euler-Bernoulli theory in the nonlinear regime. We find that its predictions deviate strongly from our measurements for the nonlinearity of the fundamental flexural mode, which show a systematic dependence on aspect ratio (length/width) together with random scatter. This contrasts with the second mode, which is always found to be in good agreement with theory. These findings underscore the delicate balance between inertial and geometric nonlinear effects in the fundamental mode, and strongly motivate further work to develop theories beyond the Euler-Bernoulli approximation. DOI: 10.1103/PhysRevB.87.024304

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Type
research article
DOI
10.1103/Physrevb.87.024304
Web of Science ID

WOS:000314093100003

Author(s)
Villanueva, L. G.  
Karabalin, R. B.
Matheny, M. H.
Chi, D.
Sader, J. E.
Roukes, M. L.
Date Issued

2013

Publisher

American Physical Society

Published in
Physical Review B
Volume

87

Issue

2

Article Number

024304

Subjects

atomic-force microscope

•

boundary-conditions

•

rectangular-plates

•

beam

•

resonators

•

vibrations

•

frequency

•

mass

Note

Villanueva, LG CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA CALTECH, Dept Phys, Pasadena, CA 91125 USA CALTECH, Dept Appl Phys, Pasadena, CA 91125 USA CALTECH, Dept Bioengn, Pasadena, CA 91125 USA Tech Univ Denmark, Dept Micro & Nanotechnol, DK-2800 Lyngby, Denmark Univ Melbourne, Dept Math & Stat, Melbourne, Vic 3010, Australia, 078IX, Times Cited:1, Cited References Count:42

Editorial or Peer reviewed

REVIEWED

Written at

OTHER

EPFL units
NEMS  
Available on Infoscience
August 6, 2013
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/93873
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