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  4. Sensitivity, Noise and Resolution in a B -Modified Foundry-Made ISFET with Miniaturized Reference Electrode for Wearable Point-of-Care Applications
 
research article

Sensitivity, Noise and Resolution in a B -Modified Foundry-Made ISFET with Miniaturized Reference Electrode for Wearable Point-of-Care Applications

Bellando, Francesco  
•
Mele, Leandro Julian
•
Palestri, Pierpaolo
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March 4, 2021
Sensors

Ion-sensitive field-effect transistors (ISFETs) form a high sensitivity and scalable class of sensors, compatible with advanced complementary metal-oxide semiconductor (CMOS) processes. Despite many previous demonstrations about their merits as low-power integrated sensors, very little is known about their noise characterization when being operated in a liquid gate configuration. The noise characteristics in various regimes of their operation are important to select the most suitable conditions for signal-to-noise ratio (SNR) and power consumption. This work reports systematic DC, transient, and noise characterizations and models of a back-end of line (B)-modified foundry-made ISFET used as pH sensor. The aim is to determine the sensor sensitivity and resolution to pH changes and to calibrate numerical and lumped element models, capable of supporting the interpretation of the experimental findings. The experimental sensitivity is approximately 40 mV/pH with a normalized resolution of 5 mpH per µm2, in agreement with the literature state of the art. Differences in the drain current noise spectra between the ISFET and MOSFET configurations of the same device at low currents (weak inversion) suggest that the chemical noise produced by the random binding/unbinding of the H+ ions on the sensor surface is likely the dominant noise contribution in this regime. In contrast, at high currents (strong inversion), the two configurations provide similar drain noise levels suggesting that the noise originates in the underlying FET rather than in the sensing region.

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Type
research article
DOI
10.3390/s21051779
Author(s)
Bellando, Francesco  
Mele, Leandro Julian
Palestri, Pierpaolo
Zhang, Junrui
Ionescu, Mihai Adrian  
Selmi, Luca
Date Issued

2021-03-04

Published in
Sensors
Volume

21

Issue

5

Article Number

1779

Subjects

ISFETs

•

electrical characterization

•

noise

•

transient behavior

•

DC behavior

Note

This is an Open Access article under the terms of the Creative Commons Attribution License

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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NANOLAB  
Available on Infoscience
March 16, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/175991
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