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  4. A Time-Resolved, Low-Noise Single-Photon Image Sensor Fabricated in Deep-Submicron CMOS Technology
 
research article

A Time-Resolved, Low-Noise Single-Photon Image Sensor Fabricated in Deep-Submicron CMOS Technology

Gersbach, Marek  
•
Maruyama, Yuki  
•
Trimananda, Rahmadi
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2012
IEEE Journal of Solid-State Circuits

We report on the design and characterization of a novel time-resolved image sensor fabricated in a 130 nm CMOS process. Each pixel within the 32x32 pixel array contains a low-noise single-photon detector and a high-precision time-to-digital converter (TDC). The 10-bit TDC exhibits a timing resolution of 119 ps with a timing uniformity across the entire array of less than 2 LSBs. The differential non-linearity (DNL) and integral non-linearity (INL) were measured at +/- 0.4 and +/- 1.2 LSBs, respectively. The pixel array was fabricated with a pitch of 50 mu m in both directions and with a total TDC area of less than 2000 mu m(2). The target application for this sensor is time-resolved imaging, in particular fluorescence lifetime imaging microscopy and 3D imaging. The characterization shows the suitability of the proposed sensor technology for these applications.

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Type
research article
DOI
10.1109/JSSC.2012.2188466
Web of Science ID

WOS:000304607700011

Author(s)
Gersbach, Marek  
Maruyama, Yuki  
Trimananda, Rahmadi
Fishburn, Matt W.
Stoppa, David
Richardson, Justin A.
Walker, Richard
Henderson, Robert
Charbon, Edoardo  
Date Issued

2012

Published in
IEEE Journal of Solid-State Circuits
Volume

47

Start page

1394

End page

1407

Subjects

Single-photon imaging

•

single-photon avalanche diode

•

Spad

•

time-to-digital converter

•

Tdc

•

time-resolved imaging

•

time-of-flight

•

fluorescence lifetime imaging microscopy

•

Flim

•

fluorescence correlation spectroscopy

•

Fcs

•

To-Digital Converter

•

Avalanche-Diode

•

Nm Cmos

•

Resolution

•

Detector

•

Precision

•

Array

•

Tdc

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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June 22, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/82051
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