Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses
 
Loading...
Thumbnail Image
conference paper

Inkjet printing of SU-8 for polymer-based MEMS a case study for microlenses

Fakhfouri, V  
•
Cantale, N
•
Mermoud, G
Show more
2008
Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems 2008
21st IEEE International Conference on Micro Electro Mechanical Systems 2008

This paper describes a novel method to fabricate polymer MEMS based on the inkjet printing of SU-8, with a special emphasis on integrated micro-optical lens arrays. Inkjet control parameters are optimized in order to enable a stable and reproducible ejection of SU-8 drops in both continuous and drop-on-demand (DOD) modes. Arbitrary patterns of single and multiple polymer drops and arrays of convex microlenses are printed on different substrates. The influence of surface wetting properties on the size and the shape of the printed patterns is investigated. The optical properties of the microlenses are investigated in details. A model for inkjet printing of high-viscous functional materials for polymer MEMS has been used.

  • Files
  • Details
  • Metrics
Type
conference paper
DOI
10.1109/MEMSYS.2008.4443679
Web of Science ID

WOS:000253356900102

Author(s)
Fakhfouri, V  
•
Cantale, N
•
Mermoud, G
•
Kim, J Y  
•
Boiko, D
•
Charbon, E
•
Martinoli, A
•
Brugger, J  
Date Issued

2008

Publisher

IEEE

Published in
Proceedings of the 21st IEEE International Conference on Micro Electro Mechanical Systems 2008
Start page

407

End page

410

URL

URL

http://www.mems2008.org/
Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
21st IEEE International Conference on Micro Electro Mechanical Systems 2008

Tucson, Arizona, USA

Jan 13-17, 2008

Available on Infoscience
February 4, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/17463
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés