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research article

Aperture-Controlled Fabrication of All-Dielectric Structural Color Pixels

Lipp, Clementine  
•
Jacquillat, Audrey  
•
Migliozzi, Daniel  
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June 29, 2023
ACS Applied Materials & Interfaces

While interference colors have been known for a longtime, conventionalcolor filters have large spatial dimensions and cannot be used tocreate compact pixelized color pictures. Here we report a simple yetelegant interference-based method of creating microscopic structuralcolor pixels using a single-mask process using standard UV photolithographyon an all-dielectric substrate. The technology makes use of the variedaperture-controlled physical deposition rate of low-temperature silicondioxide inside a hollow cavity to create a thin-film stack with thecontrolled bottom layer thickness. The stack defines which wavelengthsof the reflected light interfere constructively, and thus the cavitiesact as micrometer-scale pixels of a predefined color. Combinationsof such pixels produce vibrant colorful pictures visible to the nakedeye. Being fully CMOS-compatible, wafer-scale, and not requiring costlyelectron-beam lithography, such a method paves the way toward largescale applications of structural colors in commercial products.

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Type
research article
DOI
10.1021/acsami.3c03353
Web of Science ID

WOS:001023229700001

Author(s)
Lipp, Clementine  
Jacquillat, Audrey  
Migliozzi, Daniel  
Wang, Hsiang-Chu  
Bertsch, Arnaud  
Glushkov, Evgenii  
Martin, Olivier J. F.  
Renaud, Philippe  
Date Issued

2023-06-29

Publisher

AMER CHEMICAL SOC

Published in
ACS Applied Materials & Interfaces
Volume

15

Issue

27

Start page

33056

End page

33064

Subjects

Nanoscience & Nanotechnology

•

Materials Science, Multidisciplinary

•

Science & Technology - Other Topics

•

Materials Science

•

structural colors

•

thin films

•

interference

•

micropatterns

•

single-mask process

•

silicon nanostructures

•

step coverage

•

metasurfaces

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS4  
Available on Infoscience
July 31, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/199413
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