conference paper
Dynamic array spot shaping for laser micro machining
2009
Proceedings of the SPIE
Type
conference paper
Author(s)
Bich, A.
Weible, K. J.
Voelkel, R.
Zimmermann, M.
Harder, I.
Lindlein, N.
Scharf, T.
Date Issued
2009
Published in
Proceedings of the SPIE
Volume
7430
Start page
74300I
End page
74300I
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
| Event name | Event place | Event date |
San Diego | August 02-06, 2009 | |
Available on Infoscience
February 11, 2010
Use this identifier to reference this record