research article
Fabrication and Characterization of Cantilevers with Integrated Sharp Tips and Piezoelectric Elements for Actuation and Detection for Parallel AFM
Type
research article
Author(s)
Date Issued
1997
Published in
Volume
60
Start page
186
End page
190
Note
167
Editorial or Peer reviewed
REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
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