Capacitive pressure microsensor fabricated by bulk micromachining and sacricial layer etching

conference paper

Luque, Antonio

•

Bolea, R. G.

•

2006

Proceeding of the 32nd Annual Conference of the IEEE Industrial Electronics Society, IECON 06

Name

04153351_Luque_IECON_2006.pdf

Type

Postprint

Version

http://purl.org/coar/version/c_ab4af688f83e57aa

Access type

restricted

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774.61 KB

Format

Adobe PDF

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