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  4. Bringing the Heat Sink Closer to the Heat: Evaluating Die-embedded Microchannel Cooling of GaN-on-Si Power Devices
 
conference paper

Bringing the Heat Sink Closer to the Heat: Evaluating Die-embedded Microchannel Cooling of GaN-on-Si Power Devices

van Erp, Remco  
•
Kampitsis, Georgios  
•
Nela, Luca  
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January 1, 2020
2020 26Th International Workshop On Thermal Investigations Of Ics And Systems, Therminic
26th International Workshop on Thermal Investigations of ICs and Systems (THERMINIC)

With reducing transistor sizes and increasing levels of integration, extracting the heat from electronic devices is an ongoing challenge. Conventional indirect-cooling approaches are hindered by thermal interfaces, as well as heat spreading to larger areas which prevents dense integration. This work presents cooling strategies with microchannels directly embedded inside GaN-based semiconductor dies to extract higher heat fluxes, as well as substantially reduce pumping power. An experimental comparison is made between three levels of microchannel cooling: Indirect, using a thermal interface; direct embedded in the backside of the die; and co-designed, where the cooling channels are fundamentally integrated in the design of the electronic device. We show that, by having a cooling-centered device design, heat fluxes exceeding 1.75 kW/cm2 can be extracted with very high efficiency. Finally, to complement the compact cooling system, we discuss approaches for coolant delivery, and show how a new PCB-based coolant distribution can be used to obtain very-compact power converters, that may support the electrification of our society in the future.

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