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  4. A 73% Peak PDP Single-Photon Avalanche Diode Implemented in 110 nm CIS Technology With Doping Compensation
 
research article

A 73% Peak PDP Single-Photon Avalanche Diode Implemented in 110 nm CIS Technology With Doping Compensation

Lee, Myung-Jae
•
Karaca, Utku  
•
Kizilkan, Ekin  
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January 1, 2024
Ieee Journal Of Selected Topics In Quantum Electronics

In this article, we present 10 mu m diameter SPADs fabricated in 110 nm CIS technology based on an N (+) /HVPW junction, with enhanced sensitivity at short wavelengths. To reduce tunneling noise due to the highly-doped layers in the process, a doping compensation technique is used, which allows to adjust the doping profile of the HVPW. Thanks to this technique, DCR is reduced by a factor of 24 at 2 V excess bias voltage when compared to non-compensated devices. Furthermore, the maximum achievable PDP is enhanced by 49% thanks to the much lower DCR leading to a PDP of 73%, the highest ever reported at 440 nm, while the DCR is 12.5 cps/ mu m(2) , all at the 5 V excess bias. Since the junction is formed very close to the surface, the SPAD has excellent sensitivity in the UV spectrum, with a PDP of 43% at a wavelength of 350 nm. The proposed SPAD also achieves a PDP of 7% with a timing jitter of 68 ps at 850 nm at 5 V excess bias, which makes the device very useful for RGB-Z (RGB-D) sensors.

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Type
research article
DOI
10.1109/JSTQE.2023.3288674
Web of Science ID

WOS:001179580200001

Author(s)
Lee, Myung-Jae
Karaca, Utku  
Kizilkan, Ekin  
Bruschini, Claudio  
Charbon, Edoardo  
Date Issued

2024-01-01

Publisher

Ieee-Inst Electrical Electronics Engineers Inc

Published in
Ieee Journal Of Selected Topics In Quantum Electronics
Volume

30

Issue

1

Article Number

3800310

Subjects

Technology

•

Physical Sciences

•

Single-Photon Avalanche Diodes

•

Cmos Image Sensor Technology

•

Doping Compensation

•

High Sensitivity

•

Rgb-Z Multispectral Camera

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
AQUA  
FunderGrant Number

Swiss National Science Foundation

Available on Infoscience
April 17, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/207176
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