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conference paper
Vertical co-integration of AlSi MEMS tunable capacitors and Cu inductors for tunable LC blocks
2006
MNE 2006
Type
conference paper
Web of Science ID
WOS:000247182500158
Authors
Publication date
2006
Published in
MNE 2006
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
May 16, 2007
Use this identifier to reference this record