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  4. Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators
 
conference paper

Phase Noise Measurements Of Aluminum Scandium Nitride Oscillators

Lozzi, Andrea  
•
Liffredo, Marco  
•
Yen, Ernest Tin-Ta
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January 1, 2019
2019 20Th International Conference On Solid-State Sensors, Actuators And Microsystems & Eurosensors Xxxiii (Transducers & Eurosensors Xxxiii)
20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII (TRANSDUCERS and EUROSENSORS)

This paper presents the first phase noise (PN) measurements of oscillators based on aluminum scandium nitride (AlScN) resonators. 2-port AlScN contour mode resonators (CMR) operating at 195 MHz arc fabricated. A large pool of Q values (ranging from 150 to 1400) is obtained by tuning the anchor loss amount via design. Then, we use top bench discrete components to create a Pierce oscillator, where the resonator is contacted directly with RF probes, enabling fast phase noise measurement on a large number of CMRs. Our results arc in agreement with the Leeson's model (phase noise decreases when higher Q resonators arc used) and show that the best PN, measured at highest Q = 1413, is -100 dBc/Hz at 1 kHz offset frequency. Moreover, we compare this result to an aluminum nitride (AlN) CMR with nearly identical Q and find that the AlScN oscillator PN is 10 dBc-HZ better than the AlN oscillator at 1 kHz offset frequency.

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