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conference paper
9 MHz vibrating body FET tuning fork oscillator
2009
Frequency Control Symposium, 2009 Joint with the 22nd European Frequency and Time forum. IEEE International
A 9.4MHz micro-electromechanical oscillator based on a Vibrating Body Field Effect Transistor (VB-FET) is presented in this work. The tuning fork VB-FET used in this work provides a high quality factor of 9400 in the open-loop configuration and a low equivalent resistance. This performance makes the VB-FET an interesting candidate for fully integrated oscillator. An oscillator based on the tuning fork VB-FET is characterized.