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research article
Global optimization of an encapsulated Si/SiO2L3 cavity with a 43 million quality factor
May 12, 2021
We optimize a silica-encapsulated silicon L3 photonic crystal cavity for ultra-high quality factor by means of a global optimization strategy, where the closest holes surrounding the cavity are varied to minimize out-of-plane losses. We find an optimal value of Qc=4.33×107, which is predicted to be in the 2 million regime in presence of structural imperfections compatible with state-of-the-art silicon fabrication tolerances.
Type
research article
Author(s)
Date Issued
2021-05-12
Publisher
Published in
Volume
11
Issue
1
Article Number
10121
Note
This is an Open Access article under the terms of the Creative Commons Attribution License
Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
June 15, 2021
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