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  4. Micro-opto-mechanical 2 x 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation
 
research article

Micro-opto-mechanical 2 x 2 switch for single-mode fibers based on plasma-etched silicon mirror and electrostatic actuation

Marxer, C.
•
de Rooij, N. F.  
1999
Journal of Lightwave Technology
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