Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

Liu, Junqiu; He, Jijun; Wang, Rui Ning; Huang, Guanhao; Raja, A. S.; Lukashchuk, A.; Anderson, M. H.; Churaev, M.; Siddharth, A.; Engelsen, N. J.; Karpov, M.; Tikan, A.; Lihachev, G.; Riemensberger, J.; Weng, W.; Kippenberg, Tobias J.

doi:10.1364/ACPC.2020.T4D.1

conference paper

Wafer-scale fabrication of ultralow-loss silicon nitride nonlinear photonic circuits

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January 1, 2020

2020 Asia Communications And Photonics Conference (Acp) And International Conference On Information Photonics And Optical Communications (Ipoc)

Asia Communications and Photonics Conference / International Conference on Information Photonics and Optical Communications (ACP/IPOC)

Recent advances in silicon nitride integrated photonics have achieved ultralow optical losses. Transferring this technology to standard commercial foundries, and merging it with silicon photonics via heterogeneous integration, will seed novel laser and quantum applications. (C) 2020 The Author(s)