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research article

Stenciled conducting bismuth nanowires

Savu, Veronica  
•
Neuser, Sam
•
Villanueva, Guillermo  
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2010
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

Stencil lithography is used here for the fabrication of bismuth nanowires using thermal evaporation. This technique provides good electrical contact resistance by having the nanowire structure and the contact pads deposited at the same time. It has also the advantage of modulating nanowires' height as a function of their width. As the evaporated material deposits on the stencil mask, the apertures shrink in size until they are fully clogged and no more material can pass through. Thus, the authors obtain variable-height (from 27 to 95 nm) nanowires in the same evaporation. Upon their morphological (scanning electron microscopy and atomic force microscopy) and electrical characterizations, the authors obtain their resistivity, which is independent of the nanowire size and is the lowest reported for physical vapor deposition of Bi nanowires (1.2×10−3 Omega cm), only an order of magnitude higher than that of bulk bismuth.

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Type
research article
DOI
10.1116/1.3292630
Web of Science ID

WOS:000275511800061

Author(s)
Savu, Veronica  
Neuser, Sam
Villanueva, Guillermo  
Vazquez-Mena, Oscar  
Sidler, Katrin  
Brugger, Juergen  
Date Issued

2010

Published in
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume

28

Issue

1

Start page

169

End page

172

Subjects

atomic force microscopy

•

contact resistance

•

evaporation

•

lithography

•

nanofabrication

•

nanowires

•

scanning electron microscopy

•

Bi Nanowires

•

Thin-Films

•

Lithography

•

Transport

•

Arrays

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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Available on Infoscience
January 21, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/45783
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