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research article

Back-gate effects on DC performance and carrier transport in 22 nm FDSOI technology down to cryogenic temperatures

Han, Hung-Chi  
•
Jazaeri, Farzan  
•
D'Amico, Antonio  
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July 1, 2022
Solid-State Electronics

This paper presents an in-depth DC characterization of a 22 nm FDSOI CMOS technology down to deep cryogenic temperature, i.e., 2.95 K. The impact of the back-gate voltage (V-back) on device performance, i.e., threshold voltage (V-T) and carrier transport, is investigated over a wide temperature range. Moreover, semiclassical and quantum transports of two-dimensional carrier gas are investigated. The effective mobility (mu(eff)) extracted from short devices at cryogenic temperatures is lower than actual mobility due to the presence of ballistic transport. The discontinuous I-D-V-G is found in both long and extremely short transistors, which is ascribed to the intersubband transition happening during the scattering event. Oscillatory I-D-V-G due to resonant tunneling manifests itself in short devices at cryogenic temperatures and depends on V-back. On the other hand, the worse subthreshold swing is found for short devices in the saturation regime and at cryogenic temperatures due to source-to-drain tunneling.

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Type
research article
DOI
10.1016/j.sse.2022.108296
Web of Science ID

WOS:000793037600001

Author(s)
Han, Hung-Chi  
Jazaeri, Farzan  
D'Amico, Antonio  
Zhao, Zhixing
Lehmann, Steffen
Kretzschmar, Claudia
Charbon, Edoardo  
Enz, Christian  
Date Issued

2022-07-01

Publisher

PERGAMON-ELSEVIER SCIENCE LTD

Published in
Solid-State Electronics
Volume

193

Article Number

108296

Subjects

Engineering, Electrical & Electronic

•

Physics, Applied

•

Physics, Condensed Matter

•

Engineering

•

Physics

•

22 nm fdsoi

•

characterization

•

cryogenic cmos

•

cryogenic mosfet

•

double-gate

•

low temperature

•

mobility

•

back-gate effects

•

quantum transport

•

quantum computing

•

mobility extraction

•

scattering

•

mosfets

•

compact

•

devices

•

cmos

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

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May 23, 2022
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/187975
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