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research article

Reusability of nanostencils for the patterning of Aluminum nanostructures by selective wet etching

Vazquez-Mena, Oscar  
•
Villanueva, Guillermo  
•
van den Boogaart, M. A. F.  
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2008
Microelectronic Engineering

One of the major advantages of stencil lithography is the possibility to use stencils many times. However, when stencils contain nanoapertures, the clogging of the membranes limits the useful life time of the stencils. The clogging is due to the accumulation of material deposited inside the apertures of the stencil. Here, we report a study on the effect of the clogging on the life time of stencils after Al depositions through the stencils. Then we present a method to clean the stencils based on Al wet etching to eliminate the clogging. We show that this method allows the reusability of stencils for the repeatable depositions of Al nanostructures.

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Type
research article
DOI
10.1016/j.mee.2007.12.083
Web of Science ID

WOS:000257413400125

Author(s)
Vazquez-Mena, Oscar  
Villanueva, Guillermo  
van den Boogaart, M. A. F.  
Savu, Veronica  
Brugger, Juergen  
Date Issued

2008

Publisher

Elsevier

Published in
Microelectronic Engineering
Volume

85

Issue

5-6

Start page

1237

End page

1240

Subjects

Stencil lithography

•

Clogging

•

Cleaning

•

Shadow mask

•

Nanostencils

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
NEMS  
Available on Infoscience
September 3, 2008
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/27701
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