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  4. Epitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor deposition
 
doctoral thesis

Epitaxy and characterization of Si1-x-yGexCy alloy layers grown on (100) Si by rapid thermal chemical vapor deposition

Mi, Jian
1995
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Type
doctoral thesis
DOI
10.5075/epfl-thesis-1424
Author(s)
Mi, Jian
Advisors
Dutoit, Michel
Date Issued

1995

Publisher

EPFL

Publisher place

Lausanne

Thesis number

1424

Total of pages

141

Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/209908
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