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  4. Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS
 
research article

Three-Dimensional Nano-Acoustic Bragg Reflectors for CMOS Embedded NEMS

Yandrapalli, Soumya  
•
Ruffieux, David
•
Villanueva, Luis G.
2017
IEEE Transactions On Nanotechnology

Integration of CMOS electronic circuits and electromechanical resonators has been pursued for a long time by many different research groups and even foundries. This would improve the overall performance of electromechanical oscillators and sensors. However, the postprocessing on the CMOS substrates that is necessary to attain this integration increases the production cost so much that it becomes not interesting in most cases. We present here a method of embedding a nano electromechanical resonator within a CMOS substrate by making use of the metal layers and intermetal dielectrics to build a phononic cage that stops most acoustic energy from being lost, and thus the resonator quality factor can reach values of more than 3000 at a frequency of 3.37 GHz, taking the particular case of a 65-nm node. Our results show that the performance of the integrated resonator, both in terms of quality factor and electromechanical coupling will improve when moving to smaller nodes, thus setting the roadmap for future hybrid systems.

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Type
research article
DOI
10.1109/Tnano.2017.2701006
Web of Science ID

WOS:000405391100017

Author(s)
Yandrapalli, Soumya  
Ruffieux, David
Villanueva, Luis G.
Date Issued

2017

Publisher

Institute of Electrical and Electronics Engineers

Published in
IEEE Transactions On Nanotechnology
Volume

16

Issue

4

Start page

653

End page

658

Subjects

Bragg gratings

•

CMOS-microelectromechanical systems (MEMS)

•

phononic crystals

•

Q-factor

•

radio frequency (RF) MEMS

•

resonators

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
September 5, 2017
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/140261
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