Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Journal articles
  4. Sub-wavelength femtosecond laser based nanostructuring of complex patterns in the bulk of fused silica
 
journal article

Sub-wavelength femtosecond laser based nanostructuring of complex patterns in the bulk of fused silica

Gribaudo, Ernesto  
•
Deckart, Manuel  
•
Vlugter, Pieter  
Show more
March 4, 2025
Optics Express

Laser-inscribing arbitrary patterns with a sub-wavelength resolution in the bulk of transparent materials is of great importance for enabling reliable and versatile nano-manufacturing. Here, we propose a seeding-writing near-field enhancement based method for creating nanoplanes at arbitrary location with programmable length and curvature in a fused silica substrate. These nanoplanes, characterised by an etching contrast, present a thickness of the order of tens of nanometers and have a different refractive index from the surrounding material. Seed-less side planes are also produced under certain writing conditions. While defining ideal writing conditions for the single nanoplane inscription, we propose a model for the formation of the lateral ones. Lastly, a tomography inspired method is developed to reveal their geometry. Precisely defining the nanoplane location and its curvature make this technology of great interest for applications requiring nano-manufacturing in transparent materials.

  • Files
  • Details
  • Metrics
Type
journal article
DOI
10.1364/OE.555038
Author(s)
Gribaudo, Ernesto  

EPFL

Deckart, Manuel  

EPFL

Vlugter, Pieter  
Bellouard, Yves  

EPFL

Date Issued

2025-03-04

Publisher

Optica Publishing Group

Published in
Optics Express
Volume

33

Issue

5

Start page

11529

End page

11540

Subjects

Femtosecond lasers

•

Glass

•

Fused silica

•

Nanomanufacturing

•

Nanoscale

•

Microfabrication

•

Laser-matter interaction

•

Ultrafast laser

•

Laser

•

Non-linear optics

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
FunderFunding(s)Grant NumberGrant URL

Swiss National Science Foundation

213521

Available on Infoscience
March 5, 2025
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/247458
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés