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  4. Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics
 
conference paper

Optical Properties of Aluminium Nitride on Insulator for Integrated Photonics

Spettel, Jasmin  
•
Liffredo, Marco  
•
Cassese, Tommaso
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January 1, 2022
2022 European Conference On Optical Communication (Ecoc)
European Conference on Optical Communication (ECOC)

Aluminium nitride is a promising photonic material from the ultra-violet to the mid-infrared spectral range. We present spectroscopic ellipsometry of sputtered AlN thin films on insulator in the spectral range 0.19 mu m - 25 mu m, surface roughness characterization, waveguide and grating coupler designs at telecom wavelength. (C) 2022 The Author(s)

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