Potential of VHF-Plasmas for Low-Cost Production of a-Si:H Solar Cells

Shah, A.; Kroll, U.; Keppner, H.; Meier, J.; Torres, P.; Fischer, D.

conference paper

Shah, A.

•

Kroll, U.

•

Keppner, H.

1996

Technical Digest of the 9th PVSEC

Cite this item

Shah, A., Kroll, U., Keppner, H., Meier, J., Torres, P., & Fischer, D. (1996). Potential of VHF-Plasmas for Low-Cost Production of a-Si:H Solar Cells. Technical Digest of the 9th PVSEC, 267–270. https://infoscience.epfl.ch/handle/20.500.14299/34917

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