research article
RF-MEMS switches with AlN dielectric and their applications
This paper reports on the potential of RF-MEMS technology based on aluminum nitride capacitive dielectric and nickelsuspended membranes to provide RF circuit functions in reconfigurable front-end radios. The RF performance of capacitive switches, distributed MEMS transmission lines (DMTLs) phase shifters for beam steering and tunable filters, including center frequency and bandwidth tuning of bandpass and band-stop filters are presented. Detailed characterization based on S-parameter data demonstrates very promising figures of merit of all fabricated demonstrators from 5 to 40 GHz.
Type
research article
Author(s)
Date Issued
2011
Volume
3
Issue
5
Start page
509
End page
520
Editorial or Peer reviewed
NON-REVIEWED
Written at
EPFL
EPFL units
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