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research article

RF-MEMS switches with AlN dielectric and their applications

Fernandez-Bolanos Badia, Montserrat  
•
Nicole, Pierre
•
Ionescu, Mihai Adrian  
2011
International Journal of Microwave and Wireless Technologies

This paper reports on the potential of RF-MEMS technology based on aluminum nitride capacitive dielectric and nickelsuspended membranes to provide RF circuit functions in reconfigurable front-end radios. The RF performance of capacitive switches, distributed MEMS transmission lines (DMTLs) phase shifters for beam steering and tunable filters, including center frequency and bandwidth tuning of bandpass and band-stop filters are presented. Detailed characterization based on S-parameter data demonstrates very promising figures of merit of all fabricated demonstrators from 5 to 40 GHz.

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Type
research article
DOI
10.1017/S175907871100064X
Author(s)
Fernandez-Bolanos Badia, Montserrat  
Nicole, Pierre
Ionescu, Mihai Adrian  
Date Issued

2011

Published in
International Journal of Microwave and Wireless Technologies
Volume

3

Issue

5

Start page

509

End page

520

Subjects

RF MEMS switch

•

phase shifter

•

tunable filter

•

modelling

•

simulation and characterization of devices and systems

•

e-CUBES

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
NANOLAB  
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/77682
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