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Thermal management of micro-hotplates using MEMCAD as simulation tool
conference paper
Thermal management of micro-hotplates using MEMCAD as simulation tool
Briand, D.
•
Grétillat, M.-A.
•
van der Schoot, B.
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2000
Proc. 2000 Internat. Conf. on Modeling and Simulation of Microsystems - MSM
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