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research article

Piezoelectric micromachined ultrasonic transducers based on PZT thin films

Muralt, P.  
•
Ledermann, N.  
•
Baborowski, J.  
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2005
Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control

This paper describes fabrication and characterization results of piezoelectric micromachined ultrasonic transducers (pMUTs) based on 2-mu m-thick Pb(Zr0.53Ti0.47O3) (PZT) thin films. The applied structures are circular plates held at four bridges, thus partially unclamped. A simple analytical model for the fully clamped structure is used as a reference to optimize design parameters such as thickness relations and electrodes, and to provide approximate predictions for coupling coefficients related to previously determined thin film properties. The best coupling coefficient was achieved with a 270-mu m plate and amounted to k(2) = 5.3%. This value compares well with the calculated value based on measured small signal dielectric (epsilon = 1050) and piezoelectric (e(31,f) = 15 Cm-2) properties of the PZT thin film at 100 kV/cm dc bias. The resonances show relatively large Q-factors, which can be partially explained by the small diameters as compared to the sound wavelength in air and in the test liquid (Fluorinert 77). A transmit-receive experiment with two quasi-identical pMUTs was performed showing significant signal transmission up to a distance of 20 cm in air and 2 cm in the test liquid.

  • Details
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Type
research article
DOI
10.1109/TUFFC.2005.1563270
Web of Science ID

WOS:000234398700012

Author(s)
Muralt, P.  
Ledermann, N.  
Baborowski, J.  
Barzegar, A.  
Gentil, S.  
Belgacem, B.  
Petitgrand, S.
Bosseboeuf, A.
Setter, N.  
Date Issued

2005

Published in
Ieee Transactions on Ultrasonics Ferroelectrics and Frequency Control
Volume

52

Issue

12

Start page

2276

End page

2288

Subjects

deposition

•

coefficient

•

texture

•

layers

•

waves

•

mems

Note

Muralt, P Ecole Polytech Fed Lausanne, Ceram Lab, CH-1015 Lausanne, Switzerland Ecole Polytech Fed Lausanne, Ceram Lab, CH-1015 Lausanne, Switzerland Univ Paris 11, CNRS, Inst Elect Fondamentale, Paris, France

999OI

Cited References Count:47

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LC  
Available on Infoscience
August 21, 2006
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/233572
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