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  4. Advantages and remaining issues of state-of-the-art m-plane freestanding GaN substrates grown by halide vapor phase epitaxy for m-plane InGaN epitaxial growth
 
research article

Advantages and remaining issues of state-of-the-art m-plane freestanding GaN substrates grown by halide vapor phase epitaxy for m-plane InGaN epitaxial growth

Chichibu, S. F.
•
Kagaya, M.
•
Corfdir, Pierre Michel  
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2012
Semiconductor Science and Technology

Advantages and remaining issues of state-of-the-art m-plane freestanding GaN (FS-GaN) substrates grown by halide vapor phase epitaxy (HVPE) for m-plane InGaN epitaxial film growth by metalorganic vapor phase epitaxy are described. Because of the low threading dislocation and basal-plane stacking fault densities, improved quantum efficiency and short radiative lifetime are achieved for the near-band-edge emission of 200–250 nm thick m-plane pseudomorphic InGaN epilayers. As the surface flatness is greatly improved, the In-incorporation efficiency is lower than the cases for conventional c-plane growth and m-plane growths on due to the reduction in the area of inclined and tilted planes. Sub-micrometer-wide zonary patterns parallel to the c-axis and 2 μm long axis figure-of-eight patterns parallel to the a-axis are clearly visualized in the monochromatic cathodoluminescence (CL) intensity images.

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Type
research article
DOI
10.1088/0268-1242/27/2/024008
Web of Science ID

WOS:000300641800009

Author(s)
Chichibu, S. F.
Kagaya, M.
Corfdir, Pierre Michel  
Ganière, Jean-Daniel  
Deveaud-Plédran, Benoît  
Grandjean, Nicolas
Kubo, S.
Fujito, S.
Date Issued

2012

Publisher

Institute of Physics

Published in
Semiconductor Science and Technology
Volume

27

Issue

2

Article Number

024008

Subjects

m-plane InGaN, Freestanding GaN

Editorial or Peer reviewed

NON-REVIEWED

Written at

EPFL

EPFL units
LOEQ  
Available on Infoscience
January 20, 2012
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/76787
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