conference paper
Nonlinear Electromechanical Behavior of an Electrostatic Microrelay
1997
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Type
conference paper
Author(s)
Grétillat, M.-A.
Yang, Y.-J.
Hung, E. S.
Rabinovich, V.
Ananthasuresh, G.-K.
Senturia, S. D.
Date Issued
1997
Published in
Transducers'97 the 9th Internat. Conf. on Solid-State Sensors & Actuators
Volume
2
Start page
1141
End page
1144
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record