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  4. Third-harmonic generation monitoring of femtosecond-laser-induced in-volume functional modifications
 
research article

Third-harmonic generation monitoring of femtosecond-laser-induced in-volume functional modifications

Bernard, Olivier  
•
Kraxner, Andrea  
•
Boukhayma, Assim  
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2023
Optica

During the last two decades, ultrafast in-volume laser-based processing of transparent materials has emerged as a key 3D-printing method for manufacturing a variety of complex integrated photonic devices and micro-parts. Yet, identifying suitable laser process parameters for a given substrate remains a tedious, time-consuming task. Using a single laser source for both processing and monitoring, we demonstrate a method based on in situ full-field third-harmonic generation (THG) microscopy that exploits the properties of a low-noise CMOS imager to rapidly identify the entire processing space, discriminating different types of laser-induced modifications, and extracting incubation laws governing the laser exposure process. Furthermore, we show that full-field THG monitoring is capable of identifying parameters leading to enhanced functional properties, such as laser-enhanced etching selectivity. These findings enable accelerated implementations of laser processes of arbitrarily chosen transparent materials and, due to the rapid acquisition time (>100FPS) of the imager, closed-loop process control.

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Type
research article
DOI
10.1364/OPTICA.486746
Author(s)
Bernard, Olivier  
Kraxner, Andrea  
Boukhayma, Assim  
Squier, Jeff A.
Enz, Christian  
Bellouard, Yves  
Date Issued

2023

Published in
Optica
Volume

10

Issue

6

Start page

774

End page

782

Subjects

Femtosecond laser

•

Third-harmonic generation

•

Microscopy

•

Glass processing

•

Dielectrics

•

Laser-matter interaction

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GALATEA  
FunderGrant Number

CTI/Innosuisse

43798.1 IP-ENG

FNS

213521

Available on Infoscience
June 18, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/198290
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