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6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
conference paper
6Dynamic MEMS-based linear (1D) diffusers for laser beam homogenizing and beam shaping
Masson, J.
•
Bich, A.
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Noell, W.
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2009
Proceedings of the SPIE
Laser Beam Shaping X
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