conference paper
Microsystems for diverse applications using recently developed microfabrication techniques
2000
MOEMS and Miniaturized Systems
Type
conference paper
Author(s)
Dellmann, L.
Guenat, O.
Guldimann, B.
Luginbuhl, Ph.
Marxer, C.
Staufer, U.
van der Schoot, B.
Date Issued
2000
Published in
MOEMS and Miniaturized Systems
Start page
16
End page
27
Editorial or Peer reviewed
NON-REVIEWED
Written at
OTHER
EPFL units
Available on Infoscience
May 12, 2009
Use this identifier to reference this record