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conference paper

Gas Detection with a Micro FTIR Spectrometer in the MIR Region

Scharf, T.  
•
Briand, D.
•
Bühler, S.
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2009
Procedia Chemistry
Eurosensors XXIII Conference

We report on the application of a silicon micromachined lamellar grating interferometer in a Fourier Transform Infrared (FTIR) spectrometer for the detection of gases in the mid-infrared (MIR) region. The FTIR spectrometer was equipped with MIR optical fibers for light coupling. Gas measurements in the MIR region were focused on specific gases (CO2, CH4) in order to determine the limit of detection and the selectivity that could be obtained using such a micro-spectrometer. The influence of humidity on the gas response has also been investigated. Using two different spectral regions we were able to detect concentrations of carbon dioxide over a span from 100 ppm to 9000 ppm with a theoretical detection limit evaluated at 10 ppm. The performed gas measurements showed the proof of principle of a miniaturised FTIR gas analyzer based on a micromachined spectrometer.

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Type
conference paper
DOI
10.1016/j.proche.2009.07.344
Web of Science ID

WOS:000275995600129

Author(s)
Scharf, T.  
Briand, D.
Bühler, S.
Manzardo, O.
Herzig, H. P.  
De Rooij, N. F.  
Date Issued

2009

Publisher

Elsevier

Published in
Procedia Chemistry
Series title/Series vol.

Procedia Chemistry

Volume

1

Issue

1

Start page

1379

End page

1382

Subjects

Spectroscopic gas sensing

•

miniaturized FTIR

•

MEMS

•

mid infrared

•

green house gases

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
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Event nameEvent placeEvent date
Eurosensors XXIII Conference

Lausanne, Switzerland

September 6 - 9, 2009

Available on Infoscience
July 8, 2010
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/51551
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