conference paper
Low Impedance ALD HfO2 Partially-Filled-Gap Flexural and Bulk MEMS Resonators Piezoresistively Detected for Distributed Mass Sensing
2017
Proceedings
Type
conference paper
Author(s)
Date Issued
2017
Published in
Proceedings
Volume
1
Issue
4
Start page
391
Editorial or Peer reviewed
REVIEWED
Written at
EPFL
EPFL units
Available on Infoscience
September 27, 2017
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