conference poster not in proceedings
Fabrication of 2D Material Based NEMS Resonators
September 14, 2017
2D materials such as graphene, MoS2 and phosphorene are promising candidates for resonating mechanical sensors due to excellent tunable electrical/- mechanical properties, low masses, and maximal surface to volume ratios. Mechanical resonators based on supsended graphene have been realized. - CVD graphene wet-transferred onto 10x10 mm Si/SiO2 chips with Au electrodes - Graphene patterned in O2 plasma with a resist mask - Graphene is released by etching SiO2 in BHF and critical point drying