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Academic and Research Output
Conferences, Workshops, Symposiums, and Seminars
Tungsten Through Silicon Vias for 3D high quality factor embedded RF MEMS inductors
conference paper not in proceedings
Tungsten Through Silicon Vias for 3D high quality factor embedded RF MEMS inductors
Vitale, Wolfgang Amadeus
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Fernández-Bolaños Badía, Montserrat
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Wieland, Robert
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2013
39th International Conference on Micro and Nano Engineering
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