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  4. Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices
 
review article

Directed Self-Assembly of Block Copolymers for the Fabrication of Functional Devices

Pinto-Gomez, Christian
•
Perez-Murano, Francesc
•
Bausells, Joan
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October 1, 2020
Polymers

Directed self-assembly of block copolymers is a bottom-up approach to nanofabrication that has attracted high interest in recent years due to its inherent simplicity, high throughput, low cost and potential for sub-10 nm resolution. In this paper, we review the main principles of directed self-assembly of block copolymers and give a brief overview of some of the most extended applications. We present a novel fabrication route based on the introduction of directed self-assembly of block copolymers as a patterning option for the fabrication of nanoelectromechanical systems. As a proof of concept, we demonstrate the fabrication of suspended silicon membranes clamped by dense arrays of single-crystal silicon nanowires of sub-10 nm diameter. Resulting devices can be further developed for building up high-sensitive mass sensors based on nanomechanical resonators.

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Type
review article
DOI
10.3390/polym12102432
Web of Science ID

WOS:000585376700001

Author(s)
Pinto-Gomez, Christian
Perez-Murano, Francesc
Bausells, Joan
Villanueva, Luis Guillermo  
Fernandez-Regulez, Marta
Date Issued

2020-10-01

Publisher

MDPI

Published in
Polymers
Volume

12

Issue

10

Article Number

2432

Subjects

Polymer Science

•

block copolymers

•

directed self-assembly

•

graphoepitaxy

•

nanolithography

•

nanomechanical devices

•

nanowires

•

ps-b-pmma

•

chemical-patterns

•

microphase separation

•

thin-films

•

density multiplication

•

interaction parameter

•

orientation control

•

triblock copolymer

•

chain-end

•

lithography

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
NEMS  
Available on Infoscience
November 24, 2020
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/173535
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