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research article

A heterogeneously integrated lithium niobate-on-silicon nitride photonic platform

Churaev, Mikhail  
•
Wang, Rui Ning  
•
Riedhauser, Annina
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June 13, 2023
Nature Communications

The availability of thin-film lithiumniobate on insulator (LNOI) and advances in processing have led to the emergence of fully integrated LiNbO3 electro-optic devices. Yet to date, LiNbO3 photonic integrated circuits have mostly been fabricated using non-standard etching techniques and partially etched waveguides, that lack the reproducibility achieved in silicon photonics. Widespread application of thin-film LiNbO3 requires a reliable solution with precise lithographic control. Here we demonstrate a heterogeneously integrated LiNbO3 photonic platform employing wafer-scale bonding of thin-film LiNbO3 to silicon nitride (Si3N4) photonic integrated circuits. The platform maintains the low propagation loss (<0.1 dB/cm) and efficient fiber-to-chip coupling (<2.5 dB per facet) of the Si3N4 waveguides and provides a link between passive Si3N4 circuits and electro-optic components with adiabatic mode converters experiencing insertion losses below 0.1 dB. Using this approach we demonstrate several key applications, thus providing a scalable, foundry-ready solution to complex LiNbO3 integrated photonic circuits.

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Type
research article
DOI
10.1038/s41467-023-39047-7
Web of Science ID

WOS:001061547600033

Author(s)
Churaev, Mikhail  
Wang, Rui Ning  
Riedhauser, Annina
Snigirev, Viacheslav  
Blesin, Terence  
Mohl, Charles
Anderson, MilesH.
Siddharth, Anat  
Popoff, Youri
Drechsler, Ute
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Date Issued

2023-06-13

Publisher

Nature Portfolio

Published in
Nature Communications
Volume

14

Issue

1

Article Number

3499

Subjects

Multidisciplinary Sciences

•

Science & Technology - Other Topics

•

broad-band

•

modulator

•

generation

•

conversion

•

circuits

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LPQM  
Available on Infoscience
October 23, 2023
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/201763
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