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  4. Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly
 
conference paper

Liquid-Filled Sealed Mems Capsules Fabricated By Fluidic Self-Assembly

Mastrangeli, Massimo  
•
Jacot-Descombes, Loic
•
Gullo, Maurizio R.
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2014
IEEE 27th International Conference On Micro Electro Mechanical Systems (MEMS 2014)
IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)

We present a new method to encapsulate functional liquids into sealed MEMS capsules by fluidic self-assembly. Self-assembly of 200 mu m SU-8 cargos and picoliter liquid co-encapsulation are driven by the interplay of global fluidic drag and short-range capillary forces. The latter ensues from the localized surface-selective precipitation of a photopolymerizable adhesive onto the capsules' rim. Assembly yield higher than 50% is achieved, and can be improved by optimized agitation and shape matching. The method is massively parallel, scalable and compatible with batch MEMS fabrication. It can address a variety of applications, including distributed MEMS, cell encapsulation and drug delivery.

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Type
conference paper
DOI
10.1109/MEMSYS.2014.6765572
Web of Science ID

WOS:000352217500015

Author(s)
Mastrangeli, Massimo  
Jacot-Descombes, Loic
Gullo, Maurizio R.
Brugger, Juergen  
Date Issued

2014

Publisher

IEEE

Publisher place

New York

Published in
IEEE 27th International Conference On Micro Electro Mechanical Systems (MEMS 2014)
Total of pages

4

Start page

56

End page

59

Subjects

microencapsulation

•

self-assembly

•

fluidics

•

SU-8

•

capillarity

•

surface engineering

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LMIS1  
Event nameEvent placeEvent date
IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014)

San Francisco (USA)

January 26-30, 2014

Available on Infoscience
May 29, 2015
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/114780
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