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  4. Mems Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides
 
conference paper

Mems Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

Lagosh, Anton  
•
Guldimann, Benedikt
•
Huszka, Gergely  
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January 1, 2021
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 mu m x 111 mu m optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dualshutter is fabricated in a 211 mu m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 mu m at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time < 0.5 ms.

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Type
conference paper
DOI
10.1109/MEMS51782.2021.9375396
Web of Science ID

WOS:000667731600240

Author(s)
Lagosh, Anton  
Guldimann, Benedikt
Huszka, Gergely  
Sattari, Hamed  
Ahlers, Berit
Kerr, Gregoire
Melozzi, Mauro
Rahnama, Peyman
Nishizawa, Takeshi
Quack, Niels  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
ISBN of the book

978-1-6654-1912-3

Series title/Series vol.

Proceedings IEEE Micro Electro Mechanical Systems

Start page

961

End page

963

Subjects

Engineering, Electrical & Electronic

•

Engineering, Mechanical

•

Nanoscience & Nanotechnology

•

Engineering

•

Science & Technology - Other Topics

•

voa

•

mems

•

rectangular waveguide

•

multimode fiber

•

smart slit assembly

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
GR-QUA  
Event nameEvent placeEvent date
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

ELECTR NETWORK

Jan 25-29, 2021

Available on Infoscience
July 31, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/180303
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