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  4. Mems Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides
 
conference paper

Mems Shutter Based Variable Optical Attenuator Integrated With Large Core Multimode Rectangular Waveguides

Lagosh, Anton  
•
Guldimann, Benedikt
•
Huszka, Gergely  
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January 1, 2021
2021 34Th Ieee International Conference On Micro Electro Mechanical Systems (Mems 2021)
34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

We present the concept and design, and we report on the experimental performance of a broadband Variable Optical Attenuator (VOA) for integration with large-core rectangular multimode waveguides. Operation of an individual 221 mu m x 111 mu m optical waveguide channel employing a MEMS actuated dual-shutter to continuously modulate the intensity of the optical input signal is demonstrated experimentally. The MEMS actuated dualshutter is fabricated in a 211 mu m thick device layer of a Silicon-On-Insulator wafer by Deep Reactive Ion Etching. Electrostatic comb drive actuators allow a displacement of more than 63 mu m at 86 V, resulting in a continuously tunable attenuator efficiency of up to 99.97% at an operating wavelength of 532 nm with a reconfiguration time < 0.5 ms.

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