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research article

CVD graphene contacts for lateral heterostructure MoS2 field effect transistors

Schneider, Daniel S.
•
Lucchesi, Leonardo
•
Reato, Eros
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May 10, 2024
Npj 2D Materials And Applications

Intensive research has been carried out on two-dimensional materials, in particular molybdenum disulfide, towards high-performance field effect transistors for integrated circuits 1 . Fabricating transistors with ohmic contacts is a challenging task due to the formation of a high Schottky barrier that severely limits the performance of the transistors for real-world applications. Graphene-based heterostructures can be used in addition to, or as a substitute for unsuitable metals. In this paper, we present lateral heterostructure transistors made of scalable chemical vapor-deposited molybdenum disulfide and chemical vapor-deposited graphene achieving a low contact resistances of about 9 k Omegamu m and high on/off current ratios of 108. Furthermore, we also present a theoretical model calibrated on our experiments showing further potential for scaling transistors and contact areas into the few nanometers range and the possibility of a substantial performance enhancement by means of layer optimizations that would make transistors promising for use in future logic integrated circuits.

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Type
research article
DOI
10.1038/s41699-024-00471-y
Web of Science ID

WOS:001217990800001

Author(s)
Schneider, Daniel S.
Lucchesi, Leonardo
Reato, Eros
Wang, Zhenyu  
Piacentini, Agata
Bolten, Jens
Marian, Damiano
Marin, Enrique G.
Radenovic, Aleksandra  

EPFL

Wang, Zhenxing
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Date Issued

2024-05-10

Publisher

Nature Portfolio

Published in
Npj 2D Materials And Applications
Volume

8

Issue

1

Start page

35

Subjects

Technology

•

Physical Sciences

•

Monolayer Mos2

•

Resistance

•

Growth

•

Performance

•

Density

•

Limit

•

Ws2

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LANES  
LBEN  
FunderGrant Number

EC | EU Framework Programme for Research and Innovation H2020 | H2020 European Institute of Innovation and Technology (H2020 The European Institute of Innovation and Technology)

829035

European Union's Horizon 2020 research and innovation program

881603

Graphene Flagship

407080863

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Available on Infoscience
June 5, 2024
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/208302
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