Repository logo

Infoscience

  • English
  • French
Log In
Logo EPFL, École polytechnique fédérale de Lausanne

Infoscience

  • English
  • French
Log In
  1. Home
  2. Academic and Research Output
  3. Conferences, Workshops, Symposiums, and Seminars
  4. Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy
 
conference paper

Self-Actuated Polymer-Based Cantilevers With Sharp Silicon Tips For High-Speed Atomic Force Microscopy

Neuenschwander, Matthias  
•
Andany, Santiago H.  
•
Kanguel, Mustafa
Show more
January 1, 2021
2021 21St International Conference On Solid-State Sensors, Actuators And Microsystems (Transducers)
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

High-speed atomic force microscopy has thus far largely been limited to the use of small cantilevers in liquid, but the technique would greatly profit areas of nanotechnology that require the use of larger probes in air. We present polymer-based cantilevers with a low Q factor, an integrated electrothermal actuator and a sharp silicon tip. The devices can be used directly on commercial AFM setups utilizing a custom cantilever holder. They are suitable for high-speed tapping mode thanks to the high intrinsic damping of their polymer core. The integrated actuator allows for large amplitudes for off-resonance imaging, as well as for clean actuation tunes for tapping-mode imaging.

  • Files
  • Details
  • Metrics
Type
conference paper
DOI
10.1109/TRANSDUCERS50396.2021.9495715
Web of Science ID

WOS:000707041600008

Author(s)
Neuenschwander, Matthias  
Andany, Santiago H.  
Kanguel, Mustafa
Hosseini, Nahid  
Fantner, Georg E.  
Date Issued

2021-01-01

Publisher

IEEE

Publisher place

New York

Published in
2021 21St International Conference On Solid-State Sensors, Actuators And Microsystems (Transducers)
ISBN of the book

978-0-7381-2562-6

Series title/Series vol.

International Solid-State Sensors Actuators and Microsystems Conference

Start page

22

End page

25

Subjects

afm

•

hybrid mems

•

cantilever

•

silicon tips

•

integrated actuator

•

electrothermal

Editorial or Peer reviewed

REVIEWED

Written at

EPFL

EPFL units
LBNI  
Event nameEvent placeEvent date
21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

ELECTR NETWORK

Jun 20-25, 2021

Available on Infoscience
November 6, 2021
Use this identifier to reference this record
https://infoscience.epfl.ch/handle/20.500.14299/182732
Logo EPFL, École polytechnique fédérale de Lausanne
  • Contact
  • infoscience@epfl.ch

  • Follow us on Facebook
  • Follow us on Instagram
  • Follow us on LinkedIn
  • Follow us on X
  • Follow us on Youtube
AccessibilityLegal noticePrivacy policyCookie settingsEnd User AgreementGet helpFeedback

Infoscience is a service managed and provided by the Library and IT Services of EPFL. © EPFL, tous droits réservés